Temperature sensitivity of silicon cantilevers’ elasticity...

Sensors and Actuators A: Physical 2010 Vol. 162; Iss. 2

Temperature sensitivity of silicon cantilevers’ elasticity with the electrostatic pull-in instability

Hamed Sadeghian, Chung-Kai Yang, Hans Goosen, Andre Bossche, Paddy French, Fred van Keulen
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Volume:
162
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.sna.2010.01.012
File:
PDF, 384 KB
english, 2010
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