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In situ MEMS gradiometer with nanometer-resolution optical...

Sensors and Actuators A: Physical 2010 Vol. 159; Iss. 1

In situ MEMS gradiometer with nanometer-resolution optical detection system

Humberto Campanella, R.P. del Real, Marta Duch, Christophe Serre, I. Lucas, V. De Manuel, Héctor Guerrero, Jaume Esteve, Marina Díaz-Michelena, José A. Plaza
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Volume:
159
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2010.02.007
File:
PDF, 1.13 MB
english, 2010
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