Preparation and Character Measurements of AlN Films for RF...

Preparation and Character Measurements of AlN Films for RF Magnetron Sputtering

Gui, Tai Long, Jiang, Si Da, Ban, Chun Cheng, Liu, Jia Qing
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Volume:
663
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.663.409
Date:
February, 2013
File:
PDF, 653 KB
english, 2013
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