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Preparation and Character Measurements of AlN Films for RF Magnetron Sputtering
Gui, Tai Long, Jiang, Si Da, Ban, Chun Cheng, Liu, Jia QingVolume:
663
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.663.409
Date:
February, 2013
File:
PDF, 653 KB
english, 2013