![](/img/cover-not-exists.png)
Study, design, microfabrication and characterization of a new CMOS compatible multi-terminal pressure sensor with enhanced sensitivity
Guilherme de Oliveira Coraucci, Fabiano FruettVolume:
165
Year:
2011
Language:
english
Pages:
11
DOI:
10.1016/j.sna.2010.02.028
File:
PDF, 1.85 MB
english, 2011