Advantages of PZT thick film for MEMS sensors

Sensors and Actuators A: Physical 2010 Vol. 163; Iss. 1

Advantages of PZT thick film for MEMS sensors

C.G. Hindrichsen, R. Lou-Møller, K. Hansen, E.V. Thomsen
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Volume:
163
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2010.05.004
File:
PDF, 385 KB
english, 2010
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