High-pressure deflection behavior of laser micromachined...

Sensors and Actuators A: Physical 2010 Vol. 162; Iss. 1

High-pressure deflection behavior of laser micromachined bulk 6H-SiC MEMS sensor diaphragms

Emrah Simsek, Ben Pecholt, Charles Everson, Pal Molian
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Volume:
162
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2010.06.018
File:
PDF, 754 KB
english, 2010
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