Resonance frequency dependence on out-of-plane forces for...

Sensors and Actuators A: Physical 2010 Vol. 163; Iss. 1

Resonance frequency dependence on out-of-plane forces for square silicon membranes: Applications to a MEMS gradiometer

I. Lucas, R.P. del Real, M.D. Michelena, V. de Manuel, M. Duch, J. Esteve, J.A. Plaza
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Volume:
163
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2010.07.012
File:
PDF, 853 KB
english, 2010
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