Effect of mechanical factor in uniformity for...

Sensors and Actuators A: Physical 2010 Vol. 163; Iss. 1

Effect of mechanical factor in uniformity for electrochemical mechanical planarization

Sukhoon Jeong, Jaehyun Bae, Hyunseop Lee, Hojun Lee, Youngkyun Lee, Boumyoung Park, Hyoungjae Kim, Sungryul Kim, Haedo Jeong
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Volume:
163
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2010.07.015
File:
PDF, 1.42 MB
english, 2010
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