RF Capacitive Spectroscopy for Contactless Measurements of...

RF Capacitive Spectroscopy for Contactless Measurements of Resistivity Profiles in Highly Resistive Semiconductor Wafers

Krupka, Jerzy, Judek, Jaroslaw
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Volume:
27
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2014.2352301
Date:
November, 2014
File:
PDF, 1.29 MB
english, 2014
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