A Method for Reducing Noise and Complexity in Yield...

IEEE Transactions on Semiconductor Manufacturing 2014 / 11 Vol. 27; Iss. 4

A Method for Reducing Noise and Complexity in Yield Analysis for Manufacturing Process Workflows

Anand, Dhananjay, Moyne, James, Tilbury, Dawn M.
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Volume:
27
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2014.2361268
Date:
November, 2014
File:
PDF, 1.09 MB
english, 2014
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