Perfluorocarbon Destruction and Removal Efficiency:...

IEEE Transactions on Semiconductor Manufacturing 2014 / 11 Vol. 27; Iss. 4

Perfluorocarbon Destruction and Removal Efficiency: Considering the Byproducts and Energy Consumption of an Abatement System for Microelectronics Manufacturing

Ko, Dong Guk, Ko, Seung Jong, Choi, Eun Kyung, Min, Sang Guen, Oh, Sang Hyub, Jung, Jinsang, Kim, Byung Moon, Im, Ik-Tae
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Volume:
27
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2014.2362942
Date:
November, 2014
File:
PDF, 787 KB
english, 2014
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