Wafer Map Failure Pattern Recognition and Similarity...

IEEE Transactions on Semiconductor Manufacturing 2015 / 2 Vol. 28; Iss. 1

Wafer Map Failure Pattern Recognition and Similarity Ranking for Large-Scale Data Sets

Wu, Ming-Ju, Jang, Jyh-Shing R., Chen, Jui-Long
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Volume:
28
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2014.2364237
Date:
February, 2015
File:
PDF, 2.11 MB
english, 2015
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