Scheduling of Single-Arm Multi-cluster Tools With Wafer...

IEEE Transactions on Semiconductor Manufacturing 2015 / 2 Vol. 28; Iss. 1

Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing

Zhu, QingHua, Wu, NaiQi, Qiao, Yan, Zhou, MengChu
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Volume:
28
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2014.2375880
Date:
February, 2015
File:
PDF, 852 KB
english, 2015
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