Effects of Surface Morphological Defects and...

Materials Science Forum 2012 / 5 Vol. 717-720

Effects of Surface Morphological Defects and Crystallographic Defects on Reliability of Thermal Oxides on C-Face

Suzuki, Takuma, Yamaguchi, Hirotaka, Hatakeyama, Tetsuo, Matsuhata, Hirofumi, Senzaki, Junji, Fukuda, Kenji, Shinohe, Takashi, Okumura, Hajime
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Volume:
717-720
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.717-720.789
Date:
May, 2012
File:
PDF, 707 KB
english, 2012
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