Two degree-of-freedom micromirror actuation using thermocapillary effect in liquid droplets
Rakesh K. Dhull, Lynn Fuller, Pei-Chun Kao, Ying-Chih Liao, Yen-Wen LuVolume:
168
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2011.03.041
File:
PDF, 719 KB
english, 2011