Two degree-of-freedom micromirror actuation using...

Two degree-of-freedom micromirror actuation using thermocapillary effect in liquid droplets

Rakesh K. Dhull, Lynn Fuller, Pei-Chun Kao, Ying-Chih Liao, Yen-Wen Lu
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Volume:
168
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2011.03.041
File:
PDF, 719 KB
english, 2011
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