Effects of Annealing Atmosphere on the Characteristics and Optical Properties of SiON Films Prepared Plasma Enhanced Chemical Vapor Deposition
Yun, Ki-Jun, Jung, Dong-Ryeol, Hong, Sung-Kil, Moon, Jong-Ha, Kim, Jin-HyeokVolume:
817
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-817-L6.13
Date:
January, 2004
File:
PDF, 251 KB
english, 2004