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Development of a Robust Design of a Wet Etched Co-integrated Pressure Sensor
Schreiber-Prillwitz, Wolfgang, Saukoski, Mikko, Chmiel, Gerhard, Job, ReinhartVolume:
1299
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.61
Date:
January, 2011
File:
PDF, 190 KB
english, 2011