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Structure Effect on Electrical Properties of Ito Films Prepared by Rf Reactive Magnetron Sputtering
Meng, Li-Jian, Santos, M. P. dosVolume:
426
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-426-431
Date:
January, 1996
File:
PDF, 283 KB
english, 1996