Activation Study of Implanted N+ in 6H-SiC by Scanning Capacitance Microscopy
Raineri, Vito, Calcagno, Lucia, Giannazzo, Filippo, Goghero, D., Musumeci, F., Roccaforte, Fabrizio, La Via, FrancescoVolume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.433-436.375
File:
PDF, 443 KB
english, 2003