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Plasma polymerized TEOS films for nanochannels formation and sensor development
R.A.M. Carvalho, R.R. Lima, A.P. Nascimento Filho, M.L.P. Silva, N.R. DemarquetteVolume:
108
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.snb.2004.12.117
File:
PDF, 543 KB
english, 2005