Silicon bridge type micro-gas sensor array

Sensors and Actuators B: Chemical 2005 Vol. 108; Iss. 1-2

Silicon bridge type micro-gas sensor array

Byeong-Ui Moon, Jeong-Min Lee, Chang-Hyun Shim, Myoung-Bok Lee, Jong-Hyun Lee, Duk-Dong Lee, Jong-Ho Lee
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Volume:
108
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.snb.2005.01.042
File:
PDF, 297 KB
english, 2005
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