Sensitivity and selectivity improvement of rf sputtered WO3...

Sensors and Actuators B: Chemical 2006 Vol. 113; Iss. 1

Sensitivity and selectivity improvement of rf sputtered WO3 microhotplate gas sensors

M. Stankova, X. Vilanova, J. Calderer, E. Llobet, J. Brezmes, I. Gràcia, C. Cané, X. Correig
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Volume:
113
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.snb.2005.02.056
File:
PDF, 365 KB
english, 2006
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