Characterization of polymer layers for silicon micromachined bilayer chemical sensors using white light interferometry
D. Goustouridis, K. Manoli, S. Chatzandroulis, M. Sanopoulou, I. RaptisVolume:
111-112
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.snb.2005.03.074
File:
PDF, 242 KB
english, 2005