A micromachined resistive-type humidity sensor with a composite material as sensitive film
Pi-Guey Su, Chao-Jen Ho, Yi-Lu Sun, I-Cherng ChenVolume:
113
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.snb.2005.03.109
File:
PDF, 270 KB
english, 2006