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The Effect of Alkaline Slurry on Low-K Film
Hu, Yi, Liu, Yu Ling, Wang, Li Ran, Liu, Xiao Yan, He, Yan GangVolume:
295-297
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.295-297.1621
Date:
July, 2011
File:
PDF, 370 KB
english, 2011