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Micromachined silicon microcantilevers for gas sensing applications with capacitive read-out
Jorge Amírola, Angel Rodríguez, Luis Castañer, J.P. Santos, J. Gutiérrez, M.C. HorrilloVolume:
111-112
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.snb.2005.07.053
File:
PDF, 567 KB
english, 2005