Effect of a Gas Pressure on the Growth Rate of AlN Layer
Mokhov, E.N., Wolfson, A.A., Kazarova, O.P.Volume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.107
Date:
January, 2013
File:
PDF, 269 KB
english, 2013