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Micrometric patterning process of sol–gel SnO2, In2O3 and WO3 thin film for gas sensing applications: Towards silicon technology integration
L. Francioso, M. Russo, A.M. Taurino, P. SicilianoVolume:
119
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.snb.2005.12.006
File:
PDF, 495 KB
english, 2006