Sensing sensibility of surface micromachined suspended gate...

Sensors and Actuators B: Chemical 2006 Vol. 118; Iss. 1-2

Sensing sensibility of surface micromachined suspended gate polysilicon thin film transistors

H. Mahfoz-Kotb, A.C. Salaün, F. Bendriaa, F. Le Bihan, T. Mohammed-Brahim, J.R. Morante
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Volume:
118
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.snb.2006.04.029
File:
PDF, 481 KB
english, 2006
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