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Effects of Environment on Modlus of Low-k Porous Films Used in Back End of Line
Simonyi, Eva E, Dimitrakopoulos, Christos D, Lane, Michael, Liniger, Eric, Volksen, WilliVolume:
990
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0990-B03-15
Date:
January, 2007
File:
PDF, 397 KB
english, 2007