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Various methods used to etch titanium dioxide columnar thin films
Kupsta, Martin Roman, Taschuk, Mike, Brett, Michael J., Sit, Jeremy C.Volume:
1174
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1174-V10-04
Date:
January, 2009
File:
PDF, 816 KB
english, 2009