Reactively sputtered InxVyOz films for detection of NOx, D2, and O2
M. Ali, V. Cimalla, V. Lebedev, Th. Stauden, Ch. Wang, G. Ecke, V. Tilak, P. Sandvik, O. AmbacherVolume:
123
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.snb.2006.10.018
File:
PDF, 213 KB
english, 2007