AlGaN/GaN biosensor—effect of device processing steps on...

Sensors and Actuators B: Chemical 2007 Vol. 123; Iss. 2

AlGaN/GaN biosensor—effect of device processing steps on the surface properties and biocompatibility

I. Cimalla, F. Will, K. Tonisch, M. Niebelschütz, V. Cimalla, V. Lebedev, G. Kittler, M. Himmerlich, S. Krischok, J.A. Schaefer, M. Gebinoga, A. Schober, T. Friedrich, O. Ambacher
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Volume:
123
Year:
2007
Language:
english
Pages:
9
DOI:
10.1016/j.snb.2006.10.030
File:
PDF, 845 KB
english, 2007
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