Mechanical cross-characterization of sputtered inconel thin films for MEMS applications
Gatien Fleury, Christophe Malhaire, Charles Populaire, Marc Verdier, Arnaud Devos, Pierre-Louis Charvet, Jean-Philippe PolizziVolume:
126
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.snb.2006.10.038
File:
PDF, 494 KB
english, 2007