Micromachined piezoelectric membranes with high nominal quality factors in newtonian liquid media: A Lamb's model validation at the microscale
Cédric Ayela, Liviu NicuVolume:
123
Year:
2007
Language:
english
Pages:
9
DOI:
10.1016/j.snb.2006.10.048
File:
PDF, 1.11 MB
english, 2007