Micromachined piezoelectric membranes with high nominal...

Micromachined piezoelectric membranes with high nominal quality factors in newtonian liquid media: A Lamb's model validation at the microscale

Cédric Ayela, Liviu Nicu
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Volume:
123
Year:
2007
Language:
english
Pages:
9
DOI:
10.1016/j.snb.2006.10.048
File:
PDF, 1.11 MB
english, 2007
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