Nanoelectromechanical devices for sensing applications
V. Cimalla, F. Niebelschütz, K. Tonisch, Ch. Foerster, K. Brueckner, I. Cimalla, T. Friedrich, J. Pezoldt, R. Stephan, M. Hein, O. AmbacherVolume:
126
Year:
2007
Language:
english
Pages:
11
DOI:
10.1016/j.snb.2006.10.049
File:
PDF, 1.73 MB
english, 2007