An Autonomous and Intelligent System Using Mobile-Agent Software to Model the Calculation Processes of Film Deposition Simulators
Takahashi, Takahiro, Fukui, Noriyuki, Arakawa, Masamoto, Funatsu, Kimito, Ema, YoshinoriVolume:
1024
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1024-A06-05
Date:
January, 2007
File:
PDF, 555 KB
english, 2007