Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
J. Kritwattanakhorn, M.-L. Bauersfeld, A. Kovacs, B. Müller, U. Mescheder, S. Rademacher, J. WöllensteinVolume:
127
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.snb.2007.07.024
File:
PDF, 856 KB
english, 2007