Effect of Al2O3 Deposition and Subsequent Annealing on...

Key Engineering Materials 2011 / 2 Vol. 470

Effect of Al2O3 Deposition and Subsequent Annealing on Passivation of Defects in Ge-Rich SiGe-on-Insulator

Yang, Hai Gui, Iyota, Masatoshi, Ikeura, Shogo, Wang, Dong, Nakashima, Hiroshi
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Volume:
470
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.470.79
Date:
February, 2011
File:
PDF, 371 KB
english, 2011
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