Perchlorosilanes and Perchlorocarbosilanes as Precursors to Silicon Carbide
Sevastyanov, Vladimir, Ezhov, Yurij, Pavelko, Roman, Kuznetsov, NikolajVolume:
911
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0911-B05-12
Date:
January, 2006
File:
PDF, 459 KB
english, 2006