Perchlorosilanes and Perchlorocarbosilanes as Precursors to...

Perchlorosilanes and Perchlorocarbosilanes as Precursors to Silicon Carbide

Sevastyanov, Vladimir, Ezhov, Yurij, Pavelko, Roman, Kuznetsov, Nikolaj
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Volume:
911
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0911-B05-12
Date:
January, 2006
File:
PDF, 459 KB
english, 2006
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