Enhanced Formation of Thermal Donors in Germanium Doped...

Solid State Phenomena 2008 Vol. 131-133

Enhanced Formation of Thermal Donors in Germanium Doped Czochralski Silicon Pretreated by Rapid Thermal Annealing

Zhu, Xin, Yang, De Ren, Li, Ming, Cui, Can, Wang, Lei, Ma, Xiang Yang, Que, Duan Lin
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Volume:
131-133
Year:
2008
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.131-133.393
File:
PDF, 427 KB
english, 2008
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