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Performance Evaluation of Cleaning Solutions Enhanced with Tetraalkylammonium Hydroxide Substituents for Post-CMP Cleaning on Poly-Si Film
Pan, Tung Ming, Lei, Tan Fu, Ko, Fu Hsiang, Chao, Tien Sheng, Liaw, Ming Chi, Lee, Ying Hao, Lu, Chih PengVolume:
149
Year:
2002
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1474435
File:
PDF, 307 KB
english, 2002