Nitrogen and Hydrogen Induced Trap Passivation at the...

Materials Science Forum 2006 Vol. 527-529

Nitrogen and Hydrogen Induced Trap Passivation at the SiO2/4H-SiC Interface

Dhar, S., Wang, S.R., Ahyi, A.C., Isaacs-Smith, Tamara, Pantelides, Sokrates T., Williams, John R., Feldman, Leonard C.
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Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.949
File:
PDF, 425 KB
english, 2006
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