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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Deposition of Highly Crystallized Poly-Si Thin Films on Polymer Substrates Using Pulsed-Plasma CVD under Near-Atmospheric Pressure
Matsumoto, Mitsutaka, Suemitsu, Maki, Yara, Takuya, Setsuo, Nakajima, Tuyoshi, Uehara, Yasutake, Toyoshima, Syun, ItouVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2356344
File:
PDF, 477 KB
english, 2006