Fluxless Bonding Using Vacuum Ultraviolet and Formic Acid for 3D Interconnects
Sakuma, Katsuyuki, Unami, Naoko, Shoji, shuichi, Mizuno, JunVolume:
1249
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1249-F09-04
Date:
January, 2010
File:
PDF, 212 KB
english, 2010