Chemical Characterization and Electrical Properties of Indium Oxynitride Grown by Reactive Gas-Timing RF Magnetron Sputtering
Sungthong, A., Khomdet, P., Porntheeraphat, S., Hruanun, C., Poyai, A., Nukeaw, J.Volume:
93-94
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.93-94.443
Date:
January, 2010
File:
PDF, 277 KB
english, 2010