High Al-Doping of SiC Using a Modified PVT (M-PVT) Growth...

Materials Science Forum 2005 Vol. 483-485

High Al-Doping of SiC Using a Modified PVT (M-PVT) Growth Set-Up

Müller, Ralf, Künecke, Ulrike, Weingärtner, Roland, Schmitt, Holger, Desperrier, Patrick, Wellmann, Peter J.
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Volume:
483-485
Year:
2005
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.483-485.31
File:
PDF, 521 KB
english, 2005
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