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Modification of MeV He Implantation-Induced Cavities in Silicon by Hydrogen Plasma Treatment
Liu, C.L., Ntsoenzok, E., Barthe, Marie France, Desgardin, P., Ashok, S., Vengurlekar, A., Alquier, Daniel, Ruault, M.O.Volume:
95-96
Year:
2004
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.95-96.307
File:
PDF, 2.05 MB
english, 2004