Vertically tapered layers for optical applications...

Journal of Micromechanics and Microengineering 2009 / 07 Vol. 19; Iss. 7

Vertically tapered layers for optical applications fabricated using resist reflow

Emadi, A, Wu, H, Grabarnik, S, de Graaf, G, Wolffenbuttel, R F
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Volume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/7/074014
Date:
July, 2009
File:
PDF, 1.50 MB
english, 2009
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