Sn/Pd Catalyzation and Electroless Cu Deposition on TaN...

Journal of The Electrochemical Society 2002 Vol. 149; Iss. 3

Sn/Pd Catalyzation and Electroless Cu Deposition on TaN Diffusion Barrier Layers

Hsu, Hong-Hui, Teng, Ching-Wei, Lin, Su-Jien, Yeh, Jien-Wei
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
149
Year:
2002
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1436084
File:
PDF, 987 KB
english, 2002
Conversion to is in progress
Conversion to is failed